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Title: Vacuum MEMS sensor based on thermopiles - Simple model and experimental results
Authors: Randjelović, Danijela  ; Jovanov, Vladislav  ; Lazić, Žarko  ; Đurić, Zoran G. ; Matic, A.
Issue Date: 2008
Publication: 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings
ISSN: 2159-1660 Search Idenfier
Publisher: Institute of Electrical and Electronics Engineers Inc.
Type: Conference Paper
Collation: str. 367-370
DOI: 10.1109/ICMEL.2008.4559298
WoS-ID: 000257432600076
Scopus-ID: 2-s2.0-51749124672
URI: https://cer.ihtm.bg.ac.rs/handle/123456789/381
https://enauka.gov.rs/handle/123456789/202459
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