Fluctuations of the number of adsorbed molecules due to adsorption–desorption processes coupled with mass transfer and surface diffusion in bio/chemical MEMS sensors

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Title :	Fluctuations of the number of adsorbed molecules due to adsorption–desorption processes coupled with mass transfer and surface diffusion in bio/chemical MEMS sensors
Authors:	Đurić, Zoran G. ; Jokić, Ivana ; Peleš, Adriana
Issue Date:	2014
Publication:	Microelectronic Engineering
ISSN:	0167-9317 Microelectronic Engineering Search Idenfier
Publisher:	Elsevier
Type:	Article
Collation:	vol. 124 str. 81-85
DOI:	10.1016/j.mee.2014.06.001
WoS-ID:	000344825100016
Scopus-ID:	2-s2.0-84903139520
URI:	https://enauka.gov.rs/handle/123456789/202706 http://dais.sanu.ac.rs/123456789/4727 https://cer.ihtm.bg.ac.rs/handle/123456789/2604 https://cer.ihtm.bg.ac.rs/handle/123456789/1410 https://dais.sanu.ac.rs/123456789/541 https://dais.sanu.ac.rs/123456789/4727
Project:	Usmerena sinteza, struktura i svojstva multifunkcionalnih materijala (RS-172057) Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008) Serbian Academy of Sciences and Arts, Project F-150
M-category:	22M22

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