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Title: Vacuum Sensing Based on the Influence of Gas Pressure on Thermal Time Constant
Authors: Randjelović, Danijela  ; Kozlov, A. G.; Jakšić, Olga  
Issue Date: 2014
Publication: Proceedings of the International Conference on Microelectronics, ICM
ISSN: 2159-1660 Search Idenfier
Publisher: New York City, U.S. : Institute of Electrical and Electronics Engineers Inc.
Type: Conference Paper
Collation: str. 179-182
DOI: 10.1109/MIEL.2014.6842115
WoS-ID: 000360788600035
Scopus-ID: 2-s2.0-84904687944
URI: https://cer.ihtm.bg.ac.rs/handle/123456789/1448
https://enauka.gov.rs/handle/123456789/217657
Project: Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008)
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