Ion beam assisted deposition of TiN thin films on Si substrate

Milinović, Velimir; Milosavljević, Momir; Popović, Maja; Novaković, Mirjana M.; Peruško, Davor; Radović, Ivan; Bibić, Nataša M.

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Title:	Ion beam assisted deposition of TiN thin films on Si substrate
Authors:	Milinović, Velimir; Milosavljević, Momir ; Popović, Maja ; Novaković, Mirjana M. ; Peruško, Davor ; Radović, Ivan ; Bibić, Nataša M.
Issue Date:	2006
Publication:	Materials Science Forum
ISSN:	0255-5476 Materials Science Forum Search Idenfier
Type:	Article
Collation:	vol. 518 str. 155-160
DOI:	10.4028/www.scientific.net/MSF.518.155
WoS-ID:	000239351800027
Scopus-ID:	2-s2.0-37849043604
URI:	https://vinar.vin.bg.ac.rs/handle/123456789/6600 https://enauka.gov.rs/handle/123456789/256110
M-category:	23M23

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