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| Title: | Mobility of Ar+ in CF4 | Authors: | Jovanović, Jasmina   ; Nikitović, Željka ; Petrović, Zoran ; Raspopović, Zoran ; Stojanović, Vladimir |
Issue Date: | 2015 | Publication: | 68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing | ISSN: | 0003-0503  Search Idenfier |
Publisher: | American Physical Society, Hawaii | Type: | Conference Paper | Collation: | vol. 60 br. 9 str. GT1.00085-GT1.00085 | URI: | https://enauka.gov.rs/handle/123456789/257801 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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