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eNauka >  Results >  Intelligent thermal vacuum sensors based on multipurpose thermopile MEMS chips
Title: Intelligent thermal vacuum sensors based on multipurpose thermopile MEMS chips
Authors: Randjelović, Danijela  ; Frantlović, Miloš  ; Miljkovic, Budimir L.; Popović, Bogdan  ; Jakšić, Zoran 
Issue Date: 2014
Publication: Vacuum
ISSN: 0042-207X Vacuum Search Idenfier
Publisher: Oxford : Pergamon-Elsevier Science Ltd
Type: Article
Collation: vol. 101 str. 118-124
DOI: 10.1016/j.vacuum.2013.07.044
WoS-ID: 000330143000022
Scopus-ID: 2-s2.0-84883860148
URI: https://enauka.gov.rs/handle/123456789/276974
https://cer.ihtm.bg.ac.rs/handle/123456789/1533
http://zaposleni.etf.bg.ac.rs/rest/sciNaucniRezultati/oai/record/2/705059
Project: Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008)
Reinforcement of Regional Microsystems and Nanosystems Centre (EU-205533)
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