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| Title: | Intelligent thermal vacuum sensors based on multipurpose thermopile MEMS chips | Authors: | Randjelović, Danijela   ; Frantlović, Miloš ; Miljkovic, Budimir L.; Popović, Bogdan ; Jakšić, Zoran |
Issue Date: | 2014 | Publication: | Vacuum | ISSN: | 0042-207X Vacuum Search Idenfier |
Publisher: | Oxford : Pergamon-Elsevier Science Ltd | Type: | Article | Collation: | vol. 101 str. 118-124 | DOI: | 10.1016/j.vacuum.2013.07.044 | WoS-ID: | 000330143000022 | Scopus-ID: | 2-s2.0-84883860148 | URI: | https://enauka.gov.rs/handle/123456789/276974 https://cer.ihtm.bg.ac.rs/handle/123456789/1533 http://zaposleni.etf.bg.ac.rs/rest/sciNaucniRezultati/oai/record/2/705059 |
Project: | Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008) Reinforcement of Regional Microsystems and Nanosystems Centre (EU-205533) |
M-category: | 22M22 |
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