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Level set simulations of the anisotropic wet etching process for device fabrication in nanotechnologies
| Title: | Level set simulations of the anisotropic wet etching process for device fabrication in nanotechnologies | Authors: | Rađenović, Branislav   ; Radmilović-Rađenović, Marija |
Issue Date: | 2010 | Publication: | Chemical Industry | ISSN: | 0367-598X Hemijska industrija Search Idenfier |
Type: | Article | Collation: | vol. 64 br. 2 str. 93-97 | DOI: | 10.2298/hemind100205008r | WoS-ID: | 000279560000004 | Scopus-ID: | 2-s2.0-77952932824 | URI: | https://enauka.gov.rs/handle/123456789/279238 | Metadata source: | Migrirano iz RIS podataka | M-category: | 23M23 |
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