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One-step patterning of a flexible piezoresistive MEMS sensor by 3D direct laser writing
| Title: | One-step patterning of a flexible piezoresistive MEMS sensor by 3D direct laser writing | Authors: | Dubourg, Georges |
Issue Date: | 2015 | Publication: | 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems | Type: | Conference Paper | ISBN: | 9781467366953 Search Idenfier |
DOI: | 10.1109/nems.2015.7147490 | WoS-ID: | 000380505700132 | Scopus-ID: | 2-s2.0-84939532233 | URI: | https://enauka.gov.rs/handle/123456789/291804 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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