Ion Beam Modification of Reactively Sputtered TiN Thin Films

Popović, Maja; Novaković, Mirjana; Milosavljević, Momir; Peruško, Davor; Milinović, Velimir; Radović, Ivan; Bibić, Nataša M.

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Title:	Ion Beam Modification of Reactively Sputtered TiN Thin Films
Authors:	Popović, Maja ; Novaković, Mirjana ; Milosavljević, Momir ; Peruško, Davor ; Milinović, Velimir; Radović, Ivan ; Bibić, Nataša M.
Issue Date:	2008
Publication:	Publications of the Astronomical Observatory of Belgrade
ISSN:	0373-3742 Search Idenfier
Type:	Conference Paper
Collation:	br. 84 str. 205-208
WoS-ID:	000269314500053
URI:	https://vinar.vin.bg.ac.rs/handle/123456789/6828 https://enauka.gov.rs/handle/123456789/338987
M-category:	Mp. category will be shown later

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