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Characterization of a large-volume Oxygen RF discharge suitable for low-pressure treatment of sensitive samples
| Title: | Characterization of a large-volume Oxygen RF discharge suitable for low-pressure treatment of sensitive samples | Authors: | Malović, Gordana |
Issue Date: | 2015 | Publication: | 32nd International Conference on Phenomena in Ionized Gases (ICPIG) | Publisher: | Alexandru Ioan Cuza University, Faculty of Physics Iași, Plasma Advanced Research Centre (IPARC), Rumunija | Type: | Conference Paper | Collation: | vol. 111 br. 1111 str. P2.51-1-P2.51-4 | URI: | https://enauka.gov.rs/handle/123456789/339446 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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