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Title: Reactive species production in oxygen low-pressure RF plasma suitable for treatment of sensitive surfaces
Authors: Malović, Gordana  ; Petrović, Zoran  ; Puač, Nevena  ; Spasić, Kosta  ; Škoro, Nikola  
Issue Date: 2013
Publication: 3rd National Conference on Electronic, Atomic, Molecular and Photonic Physics
Publisher: University of Belgrade, Faculty of Physics, Studentski trg 12, 11000 Belgrade, Serbia
Type: Conference Paper
ISBN: 978-86-84539-10-8 Search Idenfier
Collation: str. 17-21
URI: https://enauka.gov.rs/handle/123456789/348810
Metadata source: Migrirano iz RIS podataka
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