Results
| Title: | Investigation of SiO/sub 2/ film on Si substrate by photoacoustic method | Authors: | Todorović, D. M.; Jović, Vesna; Smiljanić, Miloljub | Issue Date: | 2004 | Publication: | Proceedings of the International Conference on Microelectronics | Publisher: | Institute of Electrical and Electronics Engineers (IEEE) IEEE |
Type: | Conference Paper | Collation: | vol. 2 str. 471-474 | DOI: | 10.1109/ICMEL.2004.1314865 | Scopus-ID: | 2-s2.0-3142699196 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/3086 https://enauka.gov.rs/handle/123456789/352863 |
M-category: | Mp. category will be shown later |
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