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Monitoring of low-pressure plasma treatment of surfaces by real-time optical emission spectroscopy
| Title: | Monitoring of low-pressure plasma treatment of surfaces by real-time optical emission spectroscopy | Authors: | Spasić, Kosta Z.   ; Puač, Nevena S. ; Kosta Spasić; Petrović, Zoran Lj. |
Issue Date: | 2019 | Publication: | 21st International Summer School Vacuum Electron Ion Technoogies VEIT-2019 | Publisher: | Sozopol, Bugarska | Type: | Conference Paper | ISBN: | 978-954-580-382-6  Search Idenfier |
URI: | https://enauka.gov.rs/handle/123456789/356173 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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