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Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions
| Title: | Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions | Authors: | Uglov, V. V.; Abadias, G.; Rovbut, A. Y.; Zlotski, S. V.; Saladukhin, I. A.; Skuratov, Vladimir A.; Petrović, Srđan M.   |
Issue Date: | 2015 | Publication: | Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms | ISSN: | 0168-583X Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms Search Idenfier1872-9584 Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms Search Idenfier |
Type: | Article | Collation: | vol. 354 str. 269-273 | DOI: | 10.1016/j.nimb.2014.11.012 | WoS-ID: | 000356193900060 | Scopus-ID: | 2-s2.0-84939953835 | URI: | https://vinar.vin.bg.ac.rs/handle/123456789/612 https://enauka.gov.rs/handle/123456789/368806 |
Project: | Fizika i hemija sa jonskim snopovima (RS-45006) Belarusian Republic Foundation for Fundamental Research [F13F-003], Centre National de la Recherche Scientifique (bilateral project CNRS/FRFRB) [EDC25728] |
M-category: | 21aM21a |
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