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| Title: | New and versatile minature microwave plasma source | Authors: | Stefanović, Ilija   ; Bibinov, Nikita; Porteanu, Horia-Eugen; Klute, Michael; Brinkmann, Ralf Peter; Awakowicz, Peter |
Issue Date: | 2019 | Publication: | Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019 | Publisher: | Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava Bratislava : ociety for Plasma Research and Applications |
Type: | Conference Paper | ISBN: | 978-80-8147-089-9  Search Idenfier |
URI: | https://dais.sanu.ac.rs/123456789/6996 https://enauka.gov.rs/handle/123456789/381580 |
M-category: | Mp. category will be shown later |
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