Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques

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Title:	Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques
Authors:	Jokanović, Vukoman R. ; Bundaleski, Nenad ; Petrović, Božana ; Ferarra, Manuela; Jokanović, Bojan; Živković, Slavoljub ; Nasov, Ilija
Issue Date:	2022
Publication:	Vacuum
ISSN:	0042-207X Vacuum Search Idenfier
Type:	Article
Collation:	vol. 195 str. 110708-110708
DOI:	10.1016/j.vacuum.2021.110708
WoS-ID:	000733006900005
Scopus-ID:	2-s2.0-85118536987
URI:	https://vinar.vin.bg.ac.rs/handle/123456789/10029 https://enauka.gov.rs/handle/123456789/386248
Project:	Hemijsko i strukturno dizajniranje nanomaterijala za primenu u medicini i inženjerstvu tkiva (RS-172026) Funkcionalni, funkcionalizovani i usavršeni nano materijali (RS-45005) Ministry of Education, Science and Technological Development of the Republic of Serbia [Theme 0402108] Portuguese National Funding Agency for Science, Research and Technology [UID/FIS/00068/2019]
M-category:	21M21

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