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Title: Radial profile of the electron energy distribution function in RF capacitive gas discharge plasma
Authors: Malović, Gordana  ; Petrović, Zoran  ; Puač, Nevena  ; Spasić, Kosta  ; Škoro, Nikola  ; Miglena Dimitrova; Tsviatko Popov; Francisco Dias
Issue Date: 2015
Publication: Nineteenth International Summer School VEIT
Publisher: Institute of Electronics, Bulgarian Academy of Sciences, Dutch Institute for Fundamental Energy Research (DIFFER), Bugarska
Type: Conference Paper
Collation: vol. 111 br. 1111 str. 69-69
URI: https://enauka.gov.rs/handle/123456789/389117
Metadata source: Migrirano iz RIS podataka
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