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Title  : | Plasma Electronics: Applications in Microelectronic Device Fabrication | Authors: | Petrović, Zoran Lj.   ; T. Makabe |
Issue Date: | 2015 | Publisher: | Taylor and Francis, CRC Press, New York (2015). | Type: | Monograph | ISBN: | 9780750309769 - CAT# IP584 ИСБН није валидан Search Idenfier |
URI: | https://enauka.gov.rs/handle/123456789/392964 | URL: | https://www.crcpress.com/Plasma-Electronics-Applications-in-Microelectronic-Device-Fabrication/Makabe-Petrovic/p/book/9780750309769 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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