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Mass spectrometry of positive ions in capacitively coupled low pressure RF discharges in oxygen with water impurities
| Title: | Mass spectrometry of positive ions in capacitively coupled low pressure RF discharges in oxygen with water impurities | Authors: | Stefanović, Ilija   ; Stojanović, Vladimir ; Boulmer-Leborgne, Chantal; Lecas, Thomas; Kovacevic, Eva; Berndt, Johannes |
Issue Date: | 2016 | Publication: | Journal of Physics D: Applied Physics | ISSN: | 0022-3727 Journal of Physics. D: Applied Physics Search Idenfier |
Type: | Article | Collation: | vol. 49 br. 26 str. 265202-265202 | DOI: | 10.1088/0022-3727/49/26/265202 | WoS-ID: | 000380762600017 | Scopus-ID: | 2-s2.0-84978251084 | URI: | https://enauka.gov.rs/handle/123456789/393404 | Metadata source: | Migrirano iz RIS podataka | M-category: | 21M21 |
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