Dynamics of pulsed reactive RF discharges in response to thin film deposition

Sikimić, B; Stefanović, Ilija; Denysenko, I B; Winter, J; Sadeghi, N

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Title:	Dynamics of pulsed reactive RF discharges in response to thin film deposition
Authors:	Sikimić, B; Stefanović, Ilija ; Denysenko, I B; Winter, J; Sadeghi, N
Issue Date:	2014
Publication:	Plasma Sources Science and Technology
ISSN:	0963-0252 Plasma Sources Science and Technology Search Idenfier
Type:	Article
Collation:	vol. 23 br. 2 str. 025010-025010
DOI:	10.1088/0963-0252/23/2/025010
WoS-ID:	000337890700013
Scopus-ID:	2-s2.0-84898028954
URI:	https://enauka.gov.rs/handle/123456789/393688
Metadata source:	Migrirano iz RIS podataka
M-category:	21aM21a

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