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Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow
Title: | Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow | Authors: | Stefanović, Ilija ; Bibinov, Nikita; Porteanu, Horia-Eugen; Klute, Michael; Brinkmann, Ralf-Peter; Awakowicz, Peter | Issue Date: | 2018 | Publication: | Plasma Sources Science and Technology | ISSN: | 1361-6595 Plasma Sources Science and Technology Search Idenfier | Publisher: | IOP Publishing | Type: | Article | Collation: | vol. 27 br. 12 str. 12LT01-12LT01 | DOI: | 10.1088/1361-6595/aaefcc | WoS-ID: | 000454246000001 | Scopus-ID: | 2-s2.0-85060149167 | URI: | https://dais.sanu.ac.rs/123456789/4640 http://iopscience.iop.org/10.1088/1361-6595/aaefcc https://enauka.gov.rs/handle/123456789/439589 https://dais.sanu.ac.rs/123456789/4827 |
URL: | http://iopscience.iop.org/10.1088/1361-6595/aaefcc | Project: | Deutsche Forschungsgemeinschaft DFG, Project 389090373 | M-category: | 21aM21a |