Pulsed TEA CO2 laser surface modifications of silicon

Trtica, Milan; Gaković, Biljana M.

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Title:	Pulsed TEA CO2 laser surface modifications of silicon
Authors:	Trtica, Milan ; Gaković, Biljana M.
Issue Date:	2003
Publication:	Applied Surface Science
ISSN:	0169-4332 Applied Surface Science Search Idenfier
Type:	Article
Collation:	vol. 205 br. 1-4 str. 336-342
DOI:	10.1016/S0169-4332(02)01156-X
WoS-ID:	000180675100042
Scopus-ID:	2-s2.0-0037204393
URI:	https://vinar.vin.bg.ac.rs/handle/123456789/2604 https://enauka.gov.rs/handle/123456789/474572
M-category:	21M21

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