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| Title: | Langmuir probe measurements of a large scale RF CCP reactor | Authors: | Lazović, Saša   ; Malović, Gordana ; Petrović, Zoran ; Puač, Nevena ; Spasić, Kosta |
Issue Date: | 2011 | Publication: | 2nd International workshop on plasma nano-interfaces and plasma characterization | Publisher: | Cerklje, Slovenia | Type: | Conference Paper | Collation: | str. 54-54 | URI: | https://enauka.gov.rs/handle/123456789/477814 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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