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Investigation of the microcantilevers by the photoacoustic elastic bending method
| Title: | Investigation of the microcantilevers by the photoacoustic elastic bending method | Authors: | Todorović, D. M. |
Issue Date: | 2014 | Publication: | Proceedings of the International Conference on Microelectronics, ICM | ISSN: | 2159-1660![]() Search Idenfier |
Publisher: | Institute of Electrical and Electronics Engineers Inc. | Type: | Conference Paper | ISBN: | 978-1-4799-5296-0 Search Idenfier |
Collation: | str. 171-174 | DOI: | 10.1109/MIEL.2014.6842113 | WoS-ID: | 000360788600033 | Scopus-ID: | 2-s2.0-84904701230 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/1605 https://enauka.gov.rs/handle/123456789/500339 |
M-category: | Mp. category will be shown later |
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