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Title: Ion and atomic species produced in large scale oxygen plasma used for treatments sensitive materials
Authors: Malović, Gordana  ; Petrović, Zoran  ; Puač, Nevena  ; Spasić, Kosta  ; Škoro, Nikola  
Issue Date: 2013
Publication: 66th Annual Gaseous Electronics Conference
ISSN: 0003-0503 Search Idenfier
Publisher: American Physical Society, USA
Type: Conference Paper
Collation: vol. 58 br. 8 str. CT1.88-CT1.88
URI: https://enauka.gov.rs/handle/123456789/500415
Metadata source: Migrirano iz RIS podataka
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