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Title: Ion energy distribution and line intensities in asymmetrical oxygen rf discharge
Authors: Malović, Gordana  ; Petrović, Zoran  ; Spasić, Kosta  ; Škoro, Nikola  
Issue Date: 2014
Publication: 27th Summer School and International Symposium on the Physics of Ionized Gases (SPIG 2014)
Publisher: Institute of Physics, Belgrade; Klett izdavačka kuća d.o.o. ,, Serbia
Type: Conference Paper
ISBN: 978-86-7762-600-6 Search Idenfier
Collation: str. 439-442
URI: https://enauka.gov.rs/handle/123456789/500417
Metadata source: Migrirano iz RIS podataka
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