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| Title: | Ion energy distribution and line intensities in asymmetrical oxygen rf discharge | Authors: | Malović, Gordana |
Issue Date: | 2014 | Publication: | 27th Summer School and International Symposium on the Physics of Ionized Gases (SPIG 2014) | Publisher: | Institute of Physics, Belgrade; Klett izdavačka kuća d.o.o. ,, Serbia | Type: | Conference Paper | ISBN: | 978-86-7762-600-6 Search Idenfier |
Collation: | str. 439-442 | URI: | https://enauka.gov.rs/handle/123456789/500417 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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