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Characterization and global modelling of low-pressure hydrogen-based RF plasmas suitable for surface cleaning processes
| Title: | Characterization and global modelling of low-pressure hydrogen-based RF plasmas suitable for surface cleaning processes | Authors: | Škoro, Nikola   ; Puač, Nevena ; Lazović, Saša ; Cvelbar, Uroš; Kokkoris, George; Gogolides, Evangelos |
Issue Date: | 2013 | Publication: | JOURNAL OF PHYSICS D-APPLIED PHYSICS | ISSN: | 0022-3727 Journal of Physics. D: Applied Physics Search Idenfier |
Type: | Article | Collation: | vol. 46 br. 47 str. 475206-475206 | DOI: | 10.1088/0022-3727/46/47/475206 | WoS-ID: | 000326984800018 | Scopus-ID: | 2-s2.0-84887842596 | URI: | https://enauka.gov.rs/handle/123456789/507457 | Project: | EU FP7 Marie Curie Initial Training Network Surface Physics for Advanced Manufacturing-S.P.A.M [215723] Ministry of Science and Technological Development, Serbia [ON171037, III41011] ARRS AdFutura COST action [MP1011] project CORSED under the program |
Metadata source: | Migracija | M-category: | 21M21 |
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