Modeling of the Ion Induced Secondary Electron Emission in RF Plasmas with the PIC/MCC Method

Aleksandar Bojarov; Petrović, Zoran; Radmilović-Rađenović, Marija

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Title:	Modeling of the Ion Induced Secondary Electron Emission in RF Plasmas with the PIC/MCC Method
Authors:	Aleksandar Bojarov; Petrović, Zoran ; Radmilović-Rađenović, Marija
Issue Date:	2010
Publication:	63th Annual Gaseous Electronics Conference
ISSN:	0003-0503 Search Idenfier
Publisher:	American Physical Society, France
Type:	Conference Paper
Collation:	vol. 55 br. 7 str. CTP.27-CTP.27
URI:	https://enauka.gov.rs/handle/123456789/524028
Metadata source:	Migrirano iz RIS podataka
M-category:	Mp. category will be shown later

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