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Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system
| Title: | Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system | Authors: | Obradović, Marko O.  ; Pjević, Dejan J.  ; Peruško, Davor ; Grce, Ana ; Milosavljević, Momir ; Homewood, Kevin P.; Siketic, Z. |
Issue Date: | 2015 | Publication: | Thin Solid Films | ISSN: | 0040-6090 Thin Solid Films Search Idenfier |
Type: | Article | Collation: | vol. 591 str. 164-168 | DOI: | 10.1016/j.tsf.2015.03.074 | WoS-ID: | 000362008000003 | Scopus-ID: | 2-s2.0-84942831312 | URI: | https://vinar.vin.bg.ac.rs/handle/123456789/7078 https://enauka.gov.rs/handle/123456789/525339 |
Project: | SILAMPS - Silicon integrated lasers and optical amplifiers (EU-226470) SPIRIT - Support of Public and Industrial Research using Ion Beam Technology (EU-227012) Fizički procesi u sintezi novih nanostrukturnih materijala (RS-171023) IAEA, Vienna contract [17202] |
M-category: | 21M21 |
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