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Structural characterization of TiN coatings on Si substrates irradiated with Ar ions
| Title: | Structural characterization of TiN coatings on Si substrates irradiated with Ar ions | Authors: | Popović, Maja |
Issue Date: | 2009 | Publication: | Materials Characterization | ISSN: | 1044-5803 Materials Characterization Search Idenfier |
Type: | Article | Collation: | vol. 60 br. 12 str. 1463-1470 | DOI: | 10.1016/j.matchar.2009.07.002 | WoS-ID: | 000272776800006 | Scopus-ID: | 2-s2.0-70449106230 | URI: | https://enauka.gov.rs/handle/123456789/525478 https://vinar.vin.bg.ac.rs/handle/123456789/3850 |
Project: | Ministry of Sciences and Environmental Protection of the Republic of Serbia [OI141013] | M-category: | 21aM21a |
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