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| Title: | Integration of functional polymers in organic MEMS for sensing applications | Authors: | Thuau, Damien; Dubourg, Georges   ; Haupt, Karsten; Pellet, Claude; Poulin, Philippe; Dufour, Isabelle; Ayela, Cédric |
Issue Date: | 2013 | Publication: | 10th International Workshop on Nanomechanical Cantilever Sensors, Stanford, USA | Type: | Conference Paper | Collation: | str. 1-2 | URI: | https://enauka.gov.rs/handle/123456789/533593 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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