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Modifications of reactively sputtered titanium nitride films by argon and vanadium ion implantation: Microstructural and opto-electric properties
| Title: | Modifications of reactively sputtered titanium nitride films by argon and vanadium ion implantation: Microstructural and opto-electric properties | Authors: | Popović, Maja   ; Novaković, Mirjana M. ; Traverse, A.; Zhang, Kun; Bibić, Nataša M. ; Hofsaess, H.; Lieb, K. P. |
Issue Date: | 2013 | Publication: | Thin Solid Films | ISSN: | 0040-6090 Thin Solid Films Search Idenfier |
Type: | Article | Collation: | vol. 531 str. 189-196 | DOI: | 10.1016/j.tsf.2013.01.045 | WoS-ID: | 000316677900028 | Scopus-ID: | 2-s2.0-84875457620 | URI: | https://vinar.vin.bg.ac.rs/handle/123456789/5385 https://enauka.gov.rs/handle/123456789/540148 |
Project: | Funkcionalni, funkcionalizovani i usavršeni nano materijali (RS-45005) Deutsche Forschungsgemeinschaft [SER 113/2], French-Serbian CNRS-MSTD bilateral collaboration [23119] |
M-category: | 21M21 |
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