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Electron energy distribution functions in a radio-frequency argon discharge - Monte Carlo simulations
| Title: | Electron energy distribution functions in a radio-frequency argon discharge - Monte Carlo simulations | Authors: | Puač, Marija B. |
Issue Date: | 2018 | Publication: | 29th Summer School and International Symposium on the Physics of Ionized Gases | Publisher: | Vinča Institute of Nuclear Sciences, University of Belgrade, Belgrade, Serbia | Type: | Conference Paper | ISBN: | 978-86-7306-146-7 Search Idenfier |
Collation: | str. 218-221 | URI: | https://enauka.gov.rs/handle/123456789/542201 | URL: | http://www.spig2018.ipb.ac.rs/SPIG2018-book-online.pdf | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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