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Diagnostics of oxygen low-pressure rf plasma suitable for treatment of sensitive surfaces
| Title: | Diagnostics of oxygen low-pressure rf plasma suitable for treatment of sensitive surfaces | Authors: | Malović, Gordana   ; Petrović, Zoran ; Puač, Nevena ; Spasić, Kosta ; Škoro, Nikola |
Issue Date: | 2014 | Publication: | 20th International Conference on Gas Discharges and their Applications | Publisher: | GREMI, Universite d’Orleans, Francuska | Type: | Conference Paper | ISBN: | 978-2-9548207-2-9  Search Idenfier |
Collation: | str. 486-489 | URI: | https://enauka.gov.rs/handle/123456789/547112 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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