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Title: Effects of 200 keV argon ions irradiation on microstructural properties of titanium nitride films
Authors: Popović, Maja  ; Novaković, Mirjana M.  ; Šiljegović, Milorad  ; Bibić, Nataša M. 
Issue Date: 2012
Publication: Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
ISSN: 0168-583X Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms Search Idenfier
Type: Article
Collation: vol. 279 str. 144-146
DOI: 10.1016/j.nimb.2011.10.033
WoS-ID: 000303637500034
Scopus-ID: 2-s2.0-84859581891
URI: https://enauka.gov.rs/handle/123456789/549708
https://vinar.vin.bg.ac.rs/handle/123456789/6957
M-category: 
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