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Spatial and Time Characteristics of Low Tempereture RF Plasmas for Materials Processing
| Title: | Spatial and Time Characteristics of Low Tempereture RF Plasmas for Materials Processing | Authors: | Djurović Stevica  ; Roberts J. R; Olthoff J. K |
Issue Date: | 1996 | Publication: | Journal of Magnetohydrodynamics and Plasma Research | ISSN: | 1083-4729  Search Idenfier |
Type: | Article | Collation: | vol. 7 str. 1-18 | URI: | https://www.cris.uns.ac.rs/record.jsf?recordId=7219&source=eNauka&language=en https://enauka.gov.rs/handle/123456789/583387 |
M-category: | Mp. category will be shown later |
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