Primena tehnike maskless nagrizanja u vodenom rastvoru TMAH u realizaciji SOI SP-11 i usavršavanju SP-9 i SP-12 senzora pritisaka

Smiljanić, Milče M.; Lazić, Žarko; Jović, Vesna; Radulović, Katarina; Vukelić, Branko; Popović, Bogdan; Vasiljević-Radović, Dana

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Title :	Primena tehnike maskless nagrizanja u vodenom rastvoru TMAH u realizaciji SOI SP-11 i usavršavanju SP-9 i SP-12 senzora pritisaka
Authors:	Smiljanić, Milče M. ; Lazić, Žarko ; Jović, Vesna ; Radulović, Katarina ; Vukelić, Branko; Popović, Bogdan ; Vasiljević-Radović, Dana
Issue Date:	2012
Publisher:	University of Belgrade - Institute of Chemistry, Technology and Metallurgy
Type:	Other
URI:	https://enauka.gov.rs/handle/123456789/610032 https://cer.ihtm.bg.ac.rs/handle/123456789/5805
Project:	Микро, нано-системи и сензори за примену у електропривреди, процесној индустрији и заштити животне средине
M-category:	Mp. category will be shown later

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