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| Title: | Plasma Electronics Applications in Microelectronic Device Fabrication | Authors: | T. Makabe; Z. Petrović | Issue Date: | 2015 | Publisher: | CRC Press Taylor and Francis Group | Type: | Monograph | URI: | http://zaposleni.etf.bg.ac.rs/rest/sciNaucniRezultati/oai/record/4/2759 https://enauka.gov.rs/handle/123456789/741301 |
M-category: | Mp. category will be shown later |
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