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Voltage-Current Characteristics of the Unbalanced Magnetron for Reactive Deposition of Thin Films
| Title: | Voltage-Current Characteristics of the Unbalanced Magnetron for Reactive Deposition of Thin Films | Authors: | M. Zlatanović; M. Gajić; U. Kašćak; I. Popović |
Issue Date: | 2000 | Publication: | MATERIALS SCIENCE FORUM | ISSN: | 0255-5476 Materials Science Forum Search Idenfier |
Type: | Article | Collation: | vol. 352 str. 29-34 | DOI: | 10.4028/www.scientific.net/MSF.352.29 | WoS-ID: | 000168448800004 | Scopus-ID: | 2-s2.0-0034542989 | URI: | http://zaposleni.etf.bg.ac.rs/rest/sciNaucniRezultati/oai/record/2/520004 http://www.scientific.net/MSF.352.29 https://enauka.gov.rs/handle/123456789/751815 |
URL: | http://www.scientific.net/MSF.352.29 | M-category: | 21M21 |
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