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Title: Process Considerations for Screen-Printed Thick-Film MEMS
Authors: Stanimirović, Zdravko  ; Stanimirović, Ivanka  
Issue Date: 2021
Publication: 2021 IEEE 32nd International Conference on Microelectronics (MIEL)
ISSN: 2159-1679 Search Idenfier
Publisher: IEEE
Type: Conference Paper
ISBN: 978-1-6654-4528-3 Search Idenfier
Collation: str. 169-171
DOI: 10.1109/miel52794.2021.9569189
WoS-ID: 001686589600035
Scopus-ID: 2-s2.0-85118432168
URI: https://enauka.gov.rs/handle/123456789/768951
Metadata source: (Preuzeto iz ORCID-a) Stanimirovic, Zdravko
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