Data bases for modeling plasma devices for processing of integrated circuits

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Title :	Data bases for modeling plasma devices for processing of integrated circuits
Authors:	Nikitović, Ž. ; Šašić, O.; Petrović, Z.Lj. ; Malović, G. ; Strinić, A. ; Dujko, S. ; Raspopović, Z. ; Radmilović-Radjenoví, M.
Issue Date:	2004
ISSN:	1662-9752 Search Idenfier
Publisher:	Materials Science Forum PROGRESS IN ADVANCED MATERIALS AND PROCESSES
Type:	Monograph
Collation:	vol. 453-454 str. 15-20
DOI:	10.4028/www.scientific.net/msf.453-454.15
WoS-ID:	000221535700003
Scopus-ID:	2-s2.0-3142763968
URI:	https://enauka.gov.rs/handle/123456789/769235
Metadata source:	(Preuzeto iz Nasi u WoS) (Preuzeto iz ORCID-a) Nikitovic, Zeljka
M-category:	Mp. category will be shown later

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