Application of non-equilibrium plasmas in top-down and bottom-up nanotechnologies and biomedicine

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Title:	Application of non-equilibrium plasmas in top-down and bottom-up nanotechnologies and biomedicine
Authors:	Petrović, Zoran Lj ; Radmilović-Rađenović, M. ; Maguire, Paul; Radetić, Maja ; Puač, Nevena ; Marić, Dragana ; Rađenović, Branislav ; Malović, Gordana
Issue Date:	2010
Publication:	2010 27th International Conference on Microelectronics, MIEL 2010 - Proceedings
Publisher:	Institute of Electrical and Electronics Engineers (IEEE)
Type:	Conference Paper
Collation:	str. 29-36
DOI:	10.1109/MIEL.2010.5490535
Scopus-ID:	2-s2.0-77955214614
URI:	http://TechnoRep.tmf.bg.ac.rs/handle/123456789/1561 https://enauka.gov.rs/handle/123456789/769447
Project:	Физичке основе примене неравнотежних плазми у нанотехнологијама и третману материјала
M-category:	Mp. category will be shown later

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