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| Title: | On the Role of Radicals in Kinetics of Plasma Etchers in Ar/CF<sub>4</sub>Mixtures | Authors  : | Zeljka Nikitovic   ; Ž. Nikitović; V. Stojanović; Z.Lj. Petrović |
Issue Date: | 2009 | Publication: | Acta Physica Polonica A | ISSN: | 0587-4246 Acta Physica Polonica. Series A: General Physics, Physics of Condensed Matter, Optics and Quantum Electronics, Atomic and Molecular Physics, Applied Physics Search Idenfier |
Publisher: | Institute of Physics, Polish Academy of Sciences | Type: | Article | Collation: | vol. 115 br. 4 str. 765-767 | DOI: | 10.12693/aphyspola.115.765 | Scopus-ID: | 2-s2.0-66749112305 | URI: | https://enauka.gov.rs/handle/123456789/770103 | Metadata source: | (Preuzeto iz ORCID-a) Nikitovic, Zeljka | M-category: | 23M23 |
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