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Plasma surface interaction in integrated circuit production and biomedical applications
| Title: | Plasma surface interaction in integrated circuit production and biomedical applications | Authors: | Petrovic, Z. |
Issue Date: | 2009 | Publication: | Journal of Optoelectronics and Advanced Materials | ISSN: | 1454-4164 Journal of Optoelectronics and Advanced Materials Search Idenfier |
Type: | Article | Collation: | vol. 11 str. 1163-1169 | WoS-ID: | 000271103000020 | Scopus-ID: | 2-s2.0-76149093542 | URI: | https://enauka.gov.rs/handle/123456789/773800 | Metadata source: | (Preuzeto iz ORCID-a) Puac, Nevena | M-category: | 22M22 |
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