Voltampere Characteristics of Low Current Micro Discharges and Transport Coefficients in CFx/CF4 Mixtures

Petrovic, Zoran Lj.; Marić, Dragana; Nikitovic, Zeljka; C. M. O. Mahony; P. D. Maguire; Radjenovic, Radmilovic Marija; Nikola Skoro; Stojanovic, Vladimir

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Title:	Voltampere Characteristics of Low Current Micro Discharges and Transport Coefficients in CFx/CF4 Mixtures
Authors:	Petrovic, Zoran Lj.; Marić, Dragana ; Nikitovic, Zeljka ; C. M. O. Mahony; P. D. Maguire; Radjenovic, Radmilovic Marija ; Nikola Skoro ; Stojanovic, Vladimir
Issue Date:	2008
Publisher:	The 6th EU-Japan Joint Symposium on Plasma Processing (EU-Japan JSPP) April 21-23, 2008, Okinawa, Japan, pp. 16-17
Type:	Conference Paper
URI:	https://enauka.gov.rs/handle/123456789/782130
Metadata source:	(Preuzeto iz ORCID-a) Nikitovic, Zeljka
M-category:	Mp. category will be shown later

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