Data bases for modeling plasma devices for processing of integrated circuits

Petrovic, Z. Lj.; Malovic, G.; Nikitovic, Z.; Strinic, A.; S. Dujko; Raspopovic, Z.; Radjenovic, Radmilovic M.; Sasic, O.

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Title :	Data bases for modeling plasma devices for processing of integrated circuits
Authors:	Petrovic, Z. Lj.; Malovic, G. ; Nikitovic, Z. ; Strinic, A. ; S. Dujko ; Raspopovic, Z. ; Radjenovic, Radmilovic M. ; Sasic, O.
Issue Date:	2003
Publication:	Fifth Yugoslav Materials Research Society Conference “YUCOMAT”, Book of Abstracts, Editor: Prof. dr Dragan P. Uskoković 15-19 September 2003, Herceg-Novi, Serbia and Montenegro (2003) [O.S.A.II.4.] 9
Type:	Conference Paper
URI:	https://enauka.gov.rs/handle/123456789/789271
URL:	https://www.mrs-serbia.org.rs/index.php/yucomat-books-of-abstracts/yucomat-2003
Metadata source:	(Preuzeto iz ORCID-a) Nikitovic, Zeljka
M-category:	Mp. category will be shown later

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