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| Title: | Investigation of SiO2 film on Si substrate by photoacoustic method | Authors: | Todorovic, Dragan M; Jovic, Vesna B; Smiljanic, Milce M | Issue Date: | 2004 | Publication: | 2004 24TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, PROCEEDINGS, VOLS 1 AND 2 | Type: | Conference Paper | Collation: | str. 471-474 | WoS-ID: | 000222219300096 | URI: | https://enauka.gov.rs/handle/123456789/812868 | Metadata source: | (Preuzeto iz Nasi u WoS) | M-category: | Mp. category will be shown later |
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