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eNauka >  Results >  Electron transport coefficients in SiH4 and Si2H6 in dc and rf fields
Title: Electron transport coefficients in SiH4 and Si2H6 in dc and rf fields
Authors: Shimada, T; Nakamura, Y; Petrovic, Zoran Lj  ; Makabe, Toshiaki
Issue Date: 2003
Publication: JOURNAL OF PHYSICS D-APPLIED PHYSICS
ISSN: 0022-3727 Journal of Physics. D: Applied Physics Search Idenfier
Type: Article
Collation: vol. 36 br. 16 str. 1936-1946
DOI: 10.1088/0022-3727/36/16/304
WoS-ID: 000185123700004
Scopus-ID: 2-s2.0-0042322447
URI: https://enauka.gov.rs/handle/123456789/820829
Metadata source: (Preuzeto iz Nasi u WoS)
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