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Title : Probes for measurement of current, voltage, and power in capacitively coupled RF plasmas
Authors: Puac, Nevena  ; Djordjevic, Antonije R; Petrovic, Zoran Lj  
Issue Date: 2002
Publication: APPLIED PHYSICS IN SERBIA-APS
Type: Conference Paper
Collation: str. 249-252
WoS-ID: 000188097800047
URI: https://enauka.gov.rs/handle/123456789/831018
Metadata source: (Preuzeto iz Nasi u WoS)
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