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Title: Inverse modeling of semiconductor manufacturing processes by neural networks
Authors: Pantić, Dragan  ; Milenković, Srđan ; Trajković, Tatjana; Litovski, Vanče ; Stojadinović, Ninoslav 
Issue Date: 1995
Publication: Proceedings of International Conference on Microelectronics
Publisher: {IEEE}
Type: Conference Paper
ISBN: 0-7803-2786-1 Search Idenfier
DOI: 10.1109/icmel.1995.500888
URI: https://enauka.gov.rs/handle/123456789/850982
Metadata source: (Preuzeto iz ORCID-a) Pantić, Dragan
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